Invention Grant
US08068370B2 Floating gate memory device with interpoly charge trapping structure
有权
具有互补电荷捕获结构的浮栅存储器件
- Patent Title: Floating gate memory device with interpoly charge trapping structure
- Patent Title (中): 具有互补电荷捕获结构的浮栅存储器件
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Application No.: US12409935Application Date: 2009-03-24
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Publication No.: US08068370B2Publication Date: 2011-11-29
- Inventor: Hang-Ting Lue
- Applicant: Hang-Ting Lue
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Mark A. Haynes
- Main IPC: G11C16/06
- IPC: G11C16/06 ; H01L29/788 ; H01L29/792 ; H01L21/336

Abstract:
A charge trapping floating gate is described with asymmetric tunneling barriers. The memory cell includes a source region and a drain region separated by a channel region. A first tunneling barrier structure is disposed above the channel region. A floating gate is disposed above the first tunneling barrier structure covering the channel region. A second tunneling barrier is disposed above the floating gate. A dielectric charge trapping structure disposed above the second tunneling barrier and a blocking dielectric structure is disposed above the charge trapping structure. A top conductive layer disposed above the top dielectric structure acts as a gate. The second tunneling barrier is a more efficient conductor of tunneling current, under bias conditions applied for programming and erasing the memory cell, than the first tunneling barrier structure.
Public/Granted literature
- US20090262583A1 FLOATING GATE MEMORY DEVICE WITH INTERPOLY CHARGE TRAPPING STRUCTURE Public/Granted day:2009-10-22
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