Invention Grant
- Patent Title: Methods for introduction of a reactive material into a vacuum chamber
- Patent Title (中): 将反应性材料引入真空室的方法
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Application No.: US12263186Application Date: 2008-10-31
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Publication No.: US08071019B2Publication Date: 2011-12-06
- Inventor: Alan Bruce Touchberry , Terry Dean Stark
- Applicant: Alan Bruce Touchberry , Terry Dean Stark
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: C22C24/00
- IPC: C22C24/00 ; H01L21/677
Abstract:
Methods for the introduction of a reactive material into a vacuum chamber while minimizing or eliminating the simultaneous introduction of contaminating materials or substances. As a result, contaminating materials and substances that can interfere with any measurements or other processes that occur in the vacuum chamber are minimized or eliminated.
Public/Granted literature
- US20100111750A1 METHODS FOR INTRODUCTION OF A REACTIVE MATERIAL INTO A VACUUM CHAMBER Public/Granted day:2010-05-06
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