Invention Grant
US08077830B2 Beam filter positioning device 有权
光束过滤器定位装置

Beam filter positioning device
Abstract:
A system includes a beam filter positioning device including a plate configured to support one or more beam filters, and one or more axes operable to move the plate relative to a beam line. A control mechanism is coupled to the one or more axes for controlling the movement of the axes and configured to automatically adjust the position of at least one of the one or more beam filters relative to the beam line.
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