Invention Grant
- Patent Title: X-ray detector for electron microscope
- Patent Title (中): 电子显微镜X射线探伤仪
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Application No.: US12494227Application Date: 2009-06-29
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Publication No.: US08080791B2Publication Date: 2011-12-20
- Inventor: Hanno Sebastian von Harrach , Bert Freitag , Pleun Dona
- Applicant: Hanno Sebastian von Harrach , Bert Freitag , Pleun Dona
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg; David Griner
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/26

Abstract:
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Public/Granted literature
- US20100148064A1 X-RAY DETECTOR FOR ELECTRON MICROSCOPE Public/Granted day:2010-06-17
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