Invention Grant
- Patent Title: FET radiation monitor
- Patent Title (中): FET辐射监测器
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Application No.: US12719962Application Date: 2010-03-09
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Publication No.: US08080805B2Publication Date: 2011-12-20
- Inventor: Michael Gordon , Steven Koester , Kenneth Rodbell , Jeng-Bang Yau
- Applicant: Michael Gordon , Steven Koester , Kenneth Rodbell , Jeng-Bang Yau
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Louis J. Percello
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor device includes a semiconductor substrate; a buried insulator layer disposed on the semiconductor substrate, the buried insulator layer configured to retain an amount of charge in a plurality of charge traps in response to a radiation exposure by the semiconductor device; a semiconductor layer disposed on the buried insulating layer; a second insulator layer disposed on the semiconductor layer; a gate conducting layer disposed on the second insulator layer; and one or more side contacts electrically connected to the semiconductor layer. A method for radiation monitoring, the method includes applying a backgate voltage to a radiation monitor, the radiation monitor comprising a field effect transistor (FET); exposing the radiation monitor to radiation; determining a change in a threshold voltage of the radiation monitor; and determining an amount of radiation exposure based on the change in threshold voltage.
Public/Granted literature
- US20110220805A1 FET RADIATION MONITOR Public/Granted day:2011-09-15
Information query
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