Invention Grant
US08080917B2 Driving apparatus, holding apparatus, exposure apparatus, and device fabrication method 有权
驱动装置,保持装置,曝光装置和装置制造方法

Driving apparatus, holding apparatus, exposure apparatus, and device fabrication method
Abstract:
A driving apparatus, which drives an object, includes a plurality of piezoelectric elements configured to drive a plurality of portions of the object, a plurality of voltage apply units configured to apply voltages to the plurality of piezoelectric elements, and a control unit configured to control the plurality of voltage apply units so that differences among the voltages applied to the plurality of piezoelectric elements do not exceed a predetermined value.
Information query
Patent Agency Ranking
0/0