Invention Grant
US08080917B2 Driving apparatus, holding apparatus, exposure apparatus, and device fabrication method
有权
驱动装置,保持装置,曝光装置和装置制造方法
- Patent Title: Driving apparatus, holding apparatus, exposure apparatus, and device fabrication method
- Patent Title (中): 驱动装置,保持装置,曝光装置和装置制造方法
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Application No.: US12100044Application Date: 2008-04-09
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Publication No.: US08080917B2Publication Date: 2011-12-20
- Inventor: Koji Yoshiyuki
- Applicant: Koji Yoshiyuki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-112292 20070420
- Main IPC: H01L41/09
- IPC: H01L41/09

Abstract:
A driving apparatus, which drives an object, includes a plurality of piezoelectric elements configured to drive a plurality of portions of the object, a plurality of voltage apply units configured to apply voltages to the plurality of piezoelectric elements, and a control unit configured to control the plurality of voltage apply units so that differences among the voltages applied to the plurality of piezoelectric elements do not exceed a predetermined value.
Public/Granted literature
- US20090001851A1 DRIVING APPARATUS, HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD Public/Granted day:2009-01-01
Information query
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