Invention Grant
US08080925B2 Inertial sensor with dual cavity package and method of fabrication
有权
具有双腔封装和制造方法的惯性传感器
- Patent Title: Inertial sensor with dual cavity package and method of fabrication
- Patent Title (中): 具有双腔封装和制造方法的惯性传感器
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Application No.: US12236156Application Date: 2008-09-23
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Publication No.: US08080925B2Publication Date: 2011-12-20
- Inventor: William Paul Berger , Mark Andrew Collins , Michael Thomas Frazee , Thad W. (Marc) Smith , Robert Albert Anderson , Stuart John Knowles , Victor Dragotti
- Applicant: William Paul Berger , Mark Andrew Collins , Michael Thomas Frazee , Thad W. (Marc) Smith , Robert Albert Anderson , Stuart John Knowles , Victor Dragotti
- Applicant Address: US CA Moorpark
- Assignee: Custom Sensors & Technologies, Inc.
- Current Assignee: Custom Sensors & Technologies, Inc.
- Current Assignee Address: US CA Moorpark
- Agent Edward S. Wright
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
Public/Granted literature
- US20100072862A1 Inertial sensor with dual cavity package and method of fabrication Public/Granted day:2010-03-25
Information query
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