Invention Grant
US08081366B2 Oscillating device, light deflector, and image forming apparatus using the same 有权
振荡装置,光偏转器和使用其的成像装置

Oscillating device, light deflector, and image forming apparatus using the same
Abstract:
An oscillating device includes a supporting portion, a movable portion, a torsion spring that supports the movable portion with respect to the supporting portion so that the movable portion is capable of torsionally vibrating around a torsion axis, and a driving unit that vibrates the movable portion. The torsion spring is formed of single-crystal silicon, and a crystal orientation parallel to the torsion axis of the torsion spring is a [111] orientation.
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