Invention Grant
US08084812B2 Bidirectional semiconductor device, method of fabricating the same, and semiconductor device incorporating the same
有权
双向半导体器件及其制造方法以及包含该半导体器件的半导体器件
- Patent Title: Bidirectional semiconductor device, method of fabricating the same, and semiconductor device incorporating the same
- Patent Title (中): 双向半导体器件及其制造方法以及包含该半导体器件的半导体器件
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Application No.: US12612243Application Date: 2009-11-04
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Publication No.: US08084812B2Publication Date: 2011-12-27
- Inventor: Mutsumi Kitamura , Naoto Fujishima
- Applicant: Mutsumi Kitamura , Naoto Fujishima
- Applicant Address: JP
- Assignee: Fuji Electric Co., Ltd.
- Current Assignee: Fuji Electric Co., Ltd.
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2004-038698 20040216
- Main IPC: H01L31/119
- IPC: H01L31/119

Abstract:
A semiconductor device and a method of fabrication thereof includes a bidirectional device having a high breakdown voltage and a decreased ON voltage. An n-type extended drain region is formed in the bottom surface of each trench. A p-type offset region is formed in each split semiconductor region. First and second n-source regions are formed in the surface of the p-type offset region. This reduces the in-plane distance between the first and second n-source regions to thereby increase the density of cells. The breakdown voltage is maintained along the trenches. This increases the resistance to high voltages. Channels are formed in the sidewalls of the trenches by making the voltage across each gate electrode higher than the voltage across each of the first and second n-source electrodes. Thus, a bidirectional LMOSFET through which current flows in both directions is achieved. The LMOSFET has a high breakdown voltage and a decreased ON voltage.
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