Invention Grant
US08084919B2 Piezoelectric thin-film resonator, filter using the same, and duplexer using the same
有权
压电薄膜谐振器，使用其的滤波器，以及使用其的双工器
- Patent Title: Piezoelectric thin-film resonator, filter using the same, and duplexer using the same
- Patent Title (中): 压电薄膜谐振器，使用其的滤波器，以及使用其的双工器
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Application No.: US12535186Application Date: 2009-08-04
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Publication No.: US08084919B2Publication Date: 2011-12-27
- Inventor: Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda
- Applicant: Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda
- Applicant Address: JP Tokyo
- Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee: Taiyo Yuden Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox LLP
- Priority: JP2008-206089 20080808
- Main IPC: H01L41/09
- IPC: H01L41/09
Abstract:
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, the lower electrode and the upper electrode opposing each other through the piezoelectric film to form an opposing region, the opposing region including a space at a boundary of the opposing region. The space extends from an innerside to an outer side of the opposing region and is formed in or on the piezoelectric film.
Public/Granted literature
- US20100033063A1 PIEZOELECTRIC THIN0FILM RESONATOR, FILTER USING THE SAME, AND DUPLEXER USING THE SAME Public/Granted day:2010-02-11
Information query
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