Invention Grant
- Patent Title: Piezoelectric/electrostrictive film element having wavy grain boundaries
- Patent Title (中): 具有波纹晶界的压电/电致伸缩膜元件
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Application No.: US12397476Application Date: 2009-03-04
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Publication No.: US08084924B2Publication Date: 2011-12-27
- Inventor: Yukinobu Yura , Nobuyuki Kobayashi , Tsutomu Nanataki
- Applicant: Yukinobu Yura , Nobuyuki Kobayashi , Tsutomu Nanataki
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2008-074427 20080321; JP2008-152099 20080610; JP2008-303234 20081127; JP2008-317328 20081212
- Main IPC: H01L41/187
- IPC: H01L41/187

Abstract:
An actuator includes a first electrode disposed on the top surface of a ceramic substrate (for example, zirconium oxide), a piezoelectric/electrostrictive substance disposed on the first electrode, and a second electrode disposed on the piezoelectric/electrostrictive substance, wherein the input of an electric power alters the volume of the piezoelectric/electrostrictive substance. The piezoelectric/electrostrictive substance contains a plurality of crystal grains that have a wavy structure composed of wavy grain boundaries including concave portions and convex portions. The crystal grains contain ABO3 as the main component. The A site is Pb, and the B site contains such an amount of M that M becomes excessive after the piezoelectric/electrostrictive substance is formed (wherein M is at least one element selected from Mg, Ni, and Zn). The crystal grains of the piezoelectric/electrostrictive substance are oriented in the electric field direction, independently of the orientation of the substrate.
Public/Granted literature
- US20090236946A1 PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT Public/Granted day:2009-09-24
Information query
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