Invention Grant
- Patent Title: Piezoelectric thin film resonator, filter, and communication apparatus
- Patent Title (中): 压电薄膜谐振器，滤波器和通信装置
-
Application No.: US12397932Application Date: 2009-03-04
-
Publication No.: US08085115B2Publication Date: 2011-12-27
- Inventor: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Masanori Ueda
- Applicant: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Masanori Ueda
- Applicant Address: JP Tokyo
- Assignee: Taiyo Yuden Co., Ltd
- Current Assignee: Taiyo Yuden Co., Ltd
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox, LLP
- Priority: JP2008-056261 20080306
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/13 ; H03H9/15
Abstract:
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.
Public/Granted literature
- US20100060385A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS Public/Granted day:2010-03-11
Information query
IPC分类:
