Invention Grant
- Patent Title: Methods and apparatus for automated predictive design space estimation
- Patent Title (中): 自动预测设计空间估计的方法和装置
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Application No.: US12466098Application Date: 2009-05-14
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Publication No.: US08086327B2Publication Date: 2011-12-27
- Inventor: Ernst Conny Wikström , Hans Georg Joakim Sundström , Tord Åke Börje Nordahl
- Applicant: Ernst Conny Wikström , Hans Georg Joakim Sundström , Tord Åke Börje Nordahl
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06F19/00 ; G06G7/48

Abstract:
Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.
Public/Granted literature
- US20100292812A1 METHODS AND APPARATUS FOR AUTOMATED PREDICTIVE DESIGN SPACE ESTIMATION Public/Granted day:2010-11-18
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