Invention Grant
- Patent Title: Manufacturing method of an electromechanical transducer
- Patent Title (中): 机电换能器的制造方法
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Application No.: US12489315Application Date: 2009-06-22
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Publication No.: US08087153B2Publication Date: 2012-01-03
- Inventor: Ayako Kato , Chienliu Chang
- Applicant: Ayako Kato , Chienliu Chang
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2008-165066 20080624
- Main IPC: G01R3/00
- IPC: G01R3/00

Abstract:
A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.
Public/Granted literature
- US20090313809A1 ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS Public/Granted day:2009-12-24
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