Invention Grant
US08087288B1 Scanning stylus atomic force microscope with cantilever tracking and optical access
失效
扫描触针原子力显微镜与悬臂跟踪和光学访问
- Patent Title: Scanning stylus atomic force microscope with cantilever tracking and optical access
- Patent Title (中): 扫描触针原子力显微镜与悬臂跟踪和光学访问
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Application No.: US08871029Application Date: 1997-06-09
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Publication No.: US08087288B1Publication Date: 2012-01-03
- Inventor: Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
- Applicant: Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson SC
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01Q60/24

Abstract:
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
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