Invention Grant
- Patent Title: High resolution surface potential microscope
- Patent Title (中): 高分辨率表面电位显微镜
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Application No.: US12172640Application Date: 2008-07-14
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Publication No.: US08087289B2Publication Date: 2012-01-03
- Inventor: John D. Alexander , Sergei Magonov
- Applicant: John D. Alexander , Sergei Magonov
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A scanning probe system and method for using the same are disclosed. The system includes a probe that interacts with a specimen. The probe is caused to vibrate at a first frequency of the probe. A probe deflection signal indicative of an oscillation amplitude of the probe is generated and used to set the z-position probe position to maintain a property of the probe deflection signal at the first frequency at a predetermined value. A probe signal, having a DC and an AC component is applied between the specimen and the probe. The amplitude of a frequency component of the deflection signal at a mixing frequency of the first frequency and the second frequency is measured and used to generate an image or adjust the DC component.
Public/Granted literature
- US20100005868A1 High Resolution Surface Potential Microscope Public/Granted day:2010-01-14
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