Invention Grant
- Patent Title: Dual-axis resonator gyroscope
- Patent Title (中): 双轴谐振陀螺仪
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Application No.: US12282006Application Date: 2007-03-13
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Publication No.: US08087295B2Publication Date: 2012-01-03
- Inventor: Yishay Netzer
- Applicant: Yishay Netzer
- Applicant Address: IL Yuvalim
- Assignee: Yishay Sensors Ltd.
- Current Assignee: Yishay Sensors Ltd.
- Current Assignee Address: IL Yuvalim
- Agent Mark M. Friedman
- International Application: PCT/IL2007/000320 WO 20070313
- International Announcement: WO2007/105211 WO 20070920
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56

Abstract:
The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity—when operated in an open loop mode, all without interfering with the normal operation of the gyroscope. An optional sensing of the Z-axis acceleration perpendicular to the sensor plane is also provided which can be used for compensating acceleration-induced errors.
Public/Granted literature
- US20090056443A1 DUAL-AXIS RESONATOR GYROSCOPE Public/Granted day:2009-03-05
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