Invention Grant
US08087295B2 Dual-axis resonator gyroscope 有权
双轴谐振陀螺仪

  • Patent Title: Dual-axis resonator gyroscope
  • Patent Title (中): 双轴谐振陀螺仪
  • Application No.: US12282006
    Application Date: 2007-03-13
  • Publication No.: US08087295B2
    Publication Date: 2012-01-03
  • Inventor: Yishay Netzer
  • Applicant: Yishay Netzer
  • Applicant Address: IL Yuvalim
  • Assignee: Yishay Sensors Ltd.
  • Current Assignee: Yishay Sensors Ltd.
  • Current Assignee Address: IL Yuvalim
  • Agent Mark M. Friedman
  • International Application: PCT/IL2007/000320 WO 20070313
  • International Announcement: WO2007/105211 WO 20070920
  • Main IPC: G01P9/04
  • IPC: G01P9/04 G01C19/56
Dual-axis resonator gyroscope
Abstract:
The present invention discloses an improved planar, dual-axis, resonator gyroscope with mechanical coupling of adjacent vibrating members. The primary-mode flexible hinges include a tangential torsion element that largely decouples the out-of-plane resonant frequency from the wafer thickness. The use of separate plates for the force-balance and for the electric spring enables decoupling of the two functions. The invention also provides resonant frequency servo-loop for locking of the sense-mode resonant frequency to the drive-mode frequency, an online self-test, a split force balance loop for self cancellation of the quadrature signal, decoupling of the force-balance and resonant frequency servo-loops and stabilization of the inertial rate-sensing sensitivity—when operated in an open loop mode, all without interfering with the normal operation of the gyroscope. An optional sensing of the Z-axis acceleration perpendicular to the sensor plane is also provided which can be used for compensating acceleration-induced errors.
Public/Granted literature
Information query
Patent Agency Ranking
0/0