Invention Grant
US08087296B2 Angular velocity sensor 有权
角速度传感器

Angular velocity sensor
Abstract:
An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted onto the upper surface of the substrate. The first vibration element has a portion located directly above the electronic component. This angular velocity sensor has a small size.
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