Invention Grant
- Patent Title: Angular velocity sensor
- Patent Title (中): 角速度传感器
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Application No.: US12162417Application Date: 2007-03-07
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Publication No.: US08087296B2Publication Date: 2012-01-03
- Inventor: Shinjiro Ueda , Hiroaki Mouri , Koichiro Nakashima
- Applicant: Shinjiro Ueda , Hiroaki Mouri , Koichiro Nakashima
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2006-070601 20060315; JP2006-070602 20060315; JP2006-070603 20060315; JP2006-070604 20060315; JP2006-070605 20060315; JP2006-070606 20060315
- International Application: PCT/JP2007/054428 WO 20070307
- International Announcement: WO2007/105559 WO 20070920
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted onto the upper surface of the substrate. The first vibration element has a portion located directly above the electronic component. This angular velocity sensor has a small size.
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