Invention Grant
- Patent Title: Evaporative system for solar cell fabrication
- Patent Title (中): 太阳能电池制造用蒸发系统
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Application No.: US12610187Application Date: 2009-10-30
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Publication No.: US08087380B2Publication Date: 2012-01-03
- Inventor: Terry Bluck , Michael S. Barnes , Kevin P. Fairbairn
- Applicant: Terry Bluck , Michael S. Barnes , Kevin P. Fairbairn
- Applicant Address: US CA Santa Clara
- Assignee: Intevac, Inc.
- Current Assignee: Intevac, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.
Public/Granted literature
- US20110104847A1 EVAPORATIVE SYSTEM FOR SOLAR CELL FABRICATION Public/Granted day:2011-05-05
Information query
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