Invention Grant
- Patent Title: Handling device and handling method for wafers
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Application No.: US13024439Application Date: 2011-02-10
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Publication No.: US08087708B2Publication Date: 2012-01-03
- Inventor: Erich Thallner
- Applicant: Erich Thallner
- Agency: Kusner & Jaffe
- Priority: DE102006031434 20060707
- Main IPC: B65G49/07
- IPC: B65G49/07

Abstract:
The invention relates to a handling device and to a handling method for wafers, in particular for wafers with a thickness of less than 100 μm. According to the invention it is provided that an adhesive membrane is arranged so as to delimit at least one workspace, the volume of which can be changed by supplying or removing pressurising medium, and in that the size of the contact surface between the adhesive membrane and the wafer can be adjusted by changing the workspace volume.
Public/Granted literature
- US20110133500A1 HANDLING DEVICE AND HANDLING METHOD FOR WAFERS Public/Granted day:2011-06-09
Information query
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