Invention Grant
US08087754B2 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
有权
静电致动器,液滴喷射头,用于驱动液滴喷射头的方法以及用于制造静电致动器的方法
- Patent Title: Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
- Patent Title (中): 静电致动器,液滴喷射头,用于驱动液滴喷射头的方法以及用于制造静电致动器的方法
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Application No.: US12537501Application Date: 2009-08-07
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Publication No.: US08087754B2Publication Date: 2012-01-03
- Inventor: Yoshifumi Hano , Masahiro Fujii
- Applicant: Yoshifumi Hano , Masahiro Fujii
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-223216 20050801; JP2005-223217 20050801; JP2005-223218 20050801; JP2006-161130 20060609
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/055

Abstract:
To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm 4, an individual electrode 11 facing the diaphragm 4 with a gap 10 therebetween, while a voltage is applied between the diaphragm 4 and the individual electrode 11, and an insulating film 4a which is disposed on a surface of the diaphragm 4, the surface facing the individual electrode 11, are included, wherein the insulating film 4a is converted to an electret.
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