Invention Grant
US08087754B2 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator 有权
静电致动器,液滴喷射头,用于驱动液滴喷射头的方法以及用于制造静电致动器的方法

Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
Abstract:
To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm 4, an individual electrode 11 facing the diaphragm 4 with a gap 10 therebetween, while a voltage is applied between the diaphragm 4 and the individual electrode 11, and an insulating film 4a which is disposed on a surface of the diaphragm 4, the surface facing the individual electrode 11, are included, wherein the insulating film 4a is converted to an electret.
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