Invention Grant
- Patent Title: Illumination means and inspection means having an illumination means
- Patent Title (中): 具有照明装置的照明装置和检查装置
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Application No.: US12286253Application Date: 2008-09-29
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Publication No.: US08087799B2Publication Date: 2012-01-03
- Inventor: Kurt Hahn , Michael Hofmann , Christof Krampe-Zadler
- Applicant: Kurt Hahn , Michael Hofmann , Christof Krampe-Zadler
- Applicant Address: DE Weilburg
- Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee Address: DE Weilburg
- Agency: Simpson & Simpson, PLLC
- Priority: DE102007047352 20071002
- Main IPC: F21V1/04
- IPC: F21V1/04

Abstract:
An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.
Public/Granted literature
- US20090086483A1 Illumination means and inspection means having an illumination means Public/Granted day:2009-04-02
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