Invention Grant
US08087910B2 Chemical liquid supplying apparatus 失效
化学液体供给装置

  • Patent Title: Chemical liquid supplying apparatus
  • Patent Title (中): 化学液体供给装置
  • Application No.: US11909083
    Application Date: 2006-04-06
  • Publication No.: US08087910B2
    Publication Date: 2012-01-03
  • Inventor: Takeo Yajima
  • Applicant: Takeo Yajima
  • Applicant Address: JP Tokyo
  • Assignee: Koganei Corporation
  • Current Assignee: Koganei Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: McCormick, Paulding & Huber LLP
  • Priority: JP2005-115634 20050413
  • International Application: PCT/JP2006/307360 WO 20060406
  • International Announcement: WO2006/112271 WO 20061026
  • Main IPC: F04B43/08
  • IPC: F04B43/08
Chemical liquid supplying apparatus
Abstract:
A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.
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