Invention Grant
- Patent Title: Chemical liquid supplying apparatus
- Patent Title (中): 化学液体供给装置
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Application No.: US11909083Application Date: 2006-04-06
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Publication No.: US08087910B2Publication Date: 2012-01-03
- Inventor: Takeo Yajima
- Applicant: Takeo Yajima
- Applicant Address: JP Tokyo
- Assignee: Koganei Corporation
- Current Assignee: Koganei Corporation
- Current Assignee Address: JP Tokyo
- Agency: McCormick, Paulding & Huber LLP
- Priority: JP2005-115634 20050413
- International Application: PCT/JP2006/307360 WO 20060406
- International Announcement: WO2006/112271 WO 20061026
- Main IPC: F04B43/08
- IPC: F04B43/08

Abstract:
A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.
Public/Granted literature
- US20090123312A1 CHEMICAL LIQUID SUPPLYING APPARATUS Public/Granted day:2009-05-14
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