Invention Grant
- Patent Title: Molybdenum tubular sputtering targets with uniform grain size and texture
- Patent Title (中): 具有均匀粒度和质地的钼管式溅射靶
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Application No.: US11574469Application Date: 2005-08-29
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Publication No.: US08088232B2Publication Date: 2012-01-03
- Inventor: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- Applicant: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- Applicant Address: US MA Newton
- Assignee: H.C. Starck Inc.
- Current Assignee: H.C. Starck Inc.
- Current Assignee Address: US MA Newton
- Agency: Connolly Bove Lodge & Hutz LLP
- International Application: PCT/US2005/030852 WO 20050829
- International Announcement: WO2006/026621 WO 20060309
- Main IPC: C22C27/04
- IPC: C22C27/04 ; C25B9/00 ; C23C14/00 ; B22F3/24 ; B32B9/00

Abstract:
Molybdenum, sputtering targets and sintering characterized as having no or minimal texture banding or through thickness gradient. The molybdenum sputtering targets having a fine, uniform grain size as well as uniform texture, are high purity and can be micro-alloyed to improved performance. The sputtering targets can be round discs, square, rectangular or tubular and can be sputtered to form thin films on substrates. By using a segment-forming method, the size of the sputtering target can be up to 6 m×5.5 m. The thin films can be used in electronic components such as Thin Film Transistor-Liquid Crystal Displays, Plasma Display Panels, Organic Light Emitting Diodes, Inorganic Light Emitting Diode Displays, Field Emitting Displays, solar cells, sensors, semiconductor devices, and gate device for CMOS (complementary metal oxide semiconductor) with tunable work functions.
Public/Granted literature
- US20080193798A1 Molybdenum Tubular Sputtering Targets with Uniform Grain Size and Texture Public/Granted day:2008-08-14
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