Invention Grant
- Patent Title: Display device and sputtering target for producing the same
- Patent Title (中): 显示装置及其制造用溅射靶
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Application No.: US12349562Application Date: 2009-01-07
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Publication No.: US08088259B2Publication Date: 2012-01-03
- Inventor: Hiroshi Gotoh , Toshihiro Kugimiya , Katsufumi Tomihisa
- Applicant: Hiroshi Gotoh , Toshihiro Kugimiya , Katsufumi Tomihisa
- Applicant Address: JP Kobe-shi
- Assignee: Kabushiki Kaisha Kobe Seiko Sho
- Current Assignee: Kabushiki Kaisha Kobe Seiko Sho
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-040787 20050217; JP2005-344679 20051129
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/32

Abstract:
A display device in which an Al alloy film and a conductive oxide film are directly connected without interposition of refractory metal and some or all of Al alloy components deposit or are concentrated at the interface of contact between the Al alloy film and the conductive oxide film. The Al alloy film contains 0.1 to 6 at % of at least one element selected from the group consisting of Ni, Ag, Zn, Cu and Ge, and further contains 1) 0.1 to 2 at % of at least one element selected from the group consisting of Mg, Cr, Mn, Ru, Rh, Pd, Ir, Pt, La, Ce, Pr, Gd, Tb, Sm, Eu, Ho, Er, Tm, Yb, Lu and Dy or 2) 0.1 to 1 at % of at least one element selected from the group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta and W, as the alloy components.
Public/Granted literature
- US20090176113A1 DISPLAY DEVICE AND SPUTTERING TARGET FOR PRODUCING THE SAME Public/Granted day:2009-07-09
Information query
IPC分类: