Invention Grant
US08088295B2 Diamond-like carbon (DLC) hardmask and methods of fabrication using same
有权
钻石状碳（DLC）硬掩模和使用其的制造方法
- Patent Title: Diamond-like carbon (DLC) hardmask and methods of fabrication using same
- Patent Title (中): 钻石状碳（DLC）硬掩模和使用其的制造方法
-
Application No.: US12018084Application Date: 2008-01-22
-
Publication No.: US08088295B2Publication Date: 2012-01-03
- Inventor: Yi Zheng
- Applicant: Yi Zheng
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Zilka-Kotab, PC
- Main IPC: B44C1/22
- IPC: B44C1/22
Abstract:
A method according to one embodiment comprises forming a thin film layer; forming a hardmask layer above the thin film layer, the hardmask layer comprising laminated layers of diamond-like carbon; removing a portion of the hardmask layer; and removing a portion of the thin film layer that is unprotected by the hardmask layer. A method according to another embodiment comprises forming a thin film layer; forming a patterned hardmask layer above the thin film layer, the hardmask layer comprising laminated layers of diamond-like carbon; and implanting a material into a portion of the thin film layer that is unprotected by the patterned hardmask layer. Additional methods are disclosed.
Public/Granted literature
- US20090184091A1 DIAMOND-LIKE CARBON (DLC) HARDMASK AND METHODS OF FABRICATION USING SAME Public/Granted day:2009-07-23
Information query
