Invention Grant
- Patent Title: Multiple zone carrier head with flexible membrane
- Patent Title (中): 带有柔性膜的多区域载体头
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Application No.: US12955803Application Date: 2010-11-29
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Publication No.: US08088299B2Publication Date: 2012-01-03
- Inventor: Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
- Applicant: Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/00
Abstract:
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
Public/Granted literature
- US20110070810A1 MULTIPLE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE Public/Granted day:2011-03-24
Information query
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