An electrophotographic photosensitive member has a conductive substrate, a photoconductive layer formed on the conductive substrate, and a surface layer formed on the photoconductive layer. The photoconductive layer is formed of an amorphous material having chiefly silicon atoms. The surface layer has aluminum atoms, nitrogen atoms and oxygen atoms, where the nitrogen atoms are in a content of from 80 atom % or more to 95 atom % or less, and the oxygen atoms are in a content of from 1 atom % or more to 30 atom % or less, based on the aluminum atoms in the surface layer.