Invention Grant
- Patent Title: Method for producing a plug in a semiconductor body
- Patent Title (中): 用于制造半导体本体中的插头的方法
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Application No.: US12968817Application Date: 2010-12-15
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Publication No.: US08088660B1Publication Date: 2012-01-03
- Inventor: Ralf Siemieniec , Martin Henning Vielemeyer , Oliver Blank
- Applicant: Ralf Siemieniec , Martin Henning Vielemeyer , Oliver Blank
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for producing an electrode in a semiconductor layer includes providing a substrate with a first surface and a second surface, forming a first trench having sidewalls and extending into the substrate from the first surface and forming a plug in the first trench. The method further includes reducing a thickness of the semiconductor substrate by removing semiconductor material beginning at the first surface so as to at least partially uncover sidewalls of the plug and forming a semiconductor layer on the semiconductor substrate, the semiconductor layer at least partially covering the uncovered sidewalls of the plug, and having an upper surface.
Information query
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