Invention Grant
US08088684B2 Apparatus and method for semiconductor wafer bumping via injection molded solder
有权
通过注射成型焊料的半导体晶片凸块的装置和方法
- Patent Title: Apparatus and method for semiconductor wafer bumping via injection molded solder
- Patent Title (中): 通过注射成型焊料的半导体晶片凸块的装置和方法
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Application No.: US12025644Application Date: 2008-02-04
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Publication No.: US08088684B2Publication Date: 2012-01-03
- Inventor: Hale Johnson , G. Gerard Gormley
- Applicant: Hale Johnson , G. Gerard Gormley
- Applicant Address: DE Garching/Munich
- Assignee: Suss Microtec AG
- Current Assignee: Suss Microtec AG
- Current Assignee Address: DE Garching/Munich
- Agency: AKC Patents LLC
- Agent Aliki K. Collins
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
An improved apparatus and a method for semiconductor wafer bumping, that utilizes the injection molded solder process. The apparatus is designed for high volume manufacturing and includes equipment for filling patterned mold cavities formed on a first surface of a mold structure with solder, equipment for positioning and aligning a patterned first surface of a semiconductor structure directly opposite to the solder filled patterned mold cavities of the mold structure, a fixture tool for holding and transferring the aligned mold and semiconductor structures together, and equipment for receiving the fixture tool and transferring the solder from the aligned patterned mold cavities to the aligned patterned semiconductor first surface. The fixture tool includes a frame having a central aperture dimensioned to support a substrate and one or more clamp/spacer assemblies arranged symmetrically around the frame. Each clamp/spacer assembly includes a clamp configured to clamp the aligned mold and semiconductor structures together and a spacer configured to be inserted between the semiconductor structure and the mold structure.
Public/Granted literature
- US20080188069A1 APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER BUMPING VIA INJECTION MOLDED SOLDER Public/Granted day:2008-08-07
Information query
IPC分类: