Invention Grant
US08088938B2 Low decomposition storage of a tantalum precursor 有权
钽前体的低分解储存

Low decomposition storage of a tantalum precursor
Abstract:
Methods of storing a precursor which decreases the precursor decomposition rate. A vessel is provided, where the vessel has an outer surface made of a first material, and an inner surface made of a second material. The first and second materials are different. A tantalum containing precursor is placed inside the vessel, and the vessel is heated to a temperature between 60° C. and 150° C. At least part of the precursor is withdrawn from the vessel.
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