Invention Grant
- Patent Title: Micro movable device
- Patent Title (中): 微动装置
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Application No.: US12502500Application Date: 2009-07-14
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Publication No.: US08089131B2Publication Date: 2012-01-03
- Inventor: Hiroaki Yamazaki
- Applicant: Hiroaki Yamazaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-208691 20080813
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L29/82 ; H01L29/84 ; H01L23/02
Abstract:
A micro movable device includes a protection cap for protecting a movable unit arranged above a semiconductor substrate and the movable unit, signal line for transmitting a high-frequency signal formed above the semiconductor substrate, and insulation layer that has projection formed to project upward from the semiconductor substrate and coated surfaces with the signal line.
Public/Granted literature
- US20100038732A1 MICRO MOVABLE DEVICE Public/Granted day:2010-02-18
Information query
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