Invention Grant
- Patent Title: Contour resonator
- Patent Title (中): 轮廓谐振器
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Application No.: US12522822Application Date: 2008-01-10
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Publication No.: US08089201B2Publication Date: 2012-01-03
- Inventor: Akinori Yamada
- Applicant: Akinori Yamada
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-004321 20070112; JP2007-288142 20071106
- International Application: PCT/JP2008/000015 WO 20080110
- International Announcement: WO2008/084763 WO 20080717
- Main IPC: H01L41/047
- IPC: H01L41/047

Abstract:
A contour resonator reducing fluctuation of resonance frequency due to variety of a film thickness of an excitation electrode is provided. A counter resonator includes a quartz substrate and excitation electrodes respectively formed on front and back surfaces of the quartz substrate. There is a range where a frequency sensitivity with respect to an electrode film thickness is smaller than that in related art when a ratio Fe/Fb between a contour vibration frequency Fe of the excitation electrodes and a contour vibration frequency Fb of the substrate is larger than 0.69. That is, fluctuation of the contour vibration frequency with respect to variety of the electrode film thickness can be made small substantially.
Public/Granted literature
- US20100001621A1 CONTOUR RESONATOR Public/Granted day:2010-01-07
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