Invention Grant
US08089610B2 Environmental system including vacuum scavenge for an immersion lithography apparatus
有权
包括用于浸没式光刻设备的真空清除的环境系统
- Patent Title: Environmental system including vacuum scavenge for an immersion lithography apparatus
- Patent Title (中): 包括用于浸没式光刻设备的真空清除的环境系统
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Application No.: US11701378Application Date: 2007-02-02
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Publication No.: US08089610B2Publication Date: 2012-01-03
- Inventor: Andrew J. Hazelton , Michael Sogard
- Applicant: Andrew J. Hazelton , Michael Sogard
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52

Abstract:
A lithographic projection apparatus includes a liquid confinement structure extending along at least a part of a boundary of a space between a projection system and a substrate table, the space having a cross-sectional area smaller than the area of the substrate. The liquid confinement structure includes a first inlet to supply liquid, through which the patterned beam is projected, to the space, a first outlet to remove liquid after the liquid has passed under the projection system, a second inlet formed in a face of the structure, the face arranged to oppose a surface of the substrate, and located radially outward, with respect to an optical axis of the projection system, of the space to supply gas, and a second outlet formed in the face and located radially outward, with respect to an optical axis of the projection system, of the second inlet to remove gas.
Public/Granted literature
- US07932995B2 Environmental system including vacuum scavenge for an immersion lithography apparatus Public/Granted day:2011-04-26
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