Invention Grant
US08089620B2 Method for measuring optical characteristics of diffraction optical element and apparatus for measuring optical characteristics of diffraction optical element 有权
用于测量衍射光学元件的光学特性的方法和用于测量衍射光学元件的光学特性的装置

  • Patent Title: Method for measuring optical characteristics of diffraction optical element and apparatus for measuring optical characteristics of diffraction optical element
  • Patent Title (中): 用于测量衍射光学元件的光学特性的方法和用于测量衍射光学元件的光学特性的装置
  • Application No.: US12442674
    Application Date: 2007-12-13
  • Publication No.: US08089620B2
    Publication Date: 2012-01-03
  • Inventor: Takamasa AndoTsuguhiro Korenaga
  • Applicant: Takamasa AndoTsuguhiro Korenaga
  • Applicant Address: JP Osaka
  • Assignee: Panasonic Corporation
  • Current Assignee: Panasonic Corporation
  • Current Assignee Address: JP Osaka
  • Agency: McDermott Will & Emery LLP
  • Priority: JP2006-336820 20061214
  • International Application: PCT/JP2007/074058 WO 20071213
  • International Announcement: WO2008/072709 WO 20080619
  • Main IPC: G01B9/00
  • IPC: G01B9/00
Method for measuring optical characteristics of diffraction optical element and apparatus for measuring optical characteristics of diffraction optical element
Abstract:
A measurement method and an evaluating apparatus are provided which are capable of easily and accurately evaluating the light amount of a spot beam, the diffraction efficiency, and the intensity distribution in the optical axis direction by detecting even a weak diffracted beam in an arbitrary wavelength range converged by a diffraction optical element as an imaging lens.
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