Invention Grant
- Patent Title: Apparatus for detecting a sample
- Patent Title (中): 用于检测样品的装置
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Application No.: US12344328Application Date: 2008-12-26
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Publication No.: US08089637B2Publication Date: 2012-01-03
- Inventor: You-Jin Wang , Jianxin Wu
- Applicant: You-Jin Wang , Jianxin Wu
- Applicant Address: TW Hsinchu
- Assignee: Hermes Microvision, Inc.
- Current Assignee: Hermes Microvision, Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Rosenberg, Klein & Lee
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
An apparatus for effectively detecting and calibrating a sample of examination system. The apparatus has an optical-electronic assembly for detection of the sample initiated with a light projected to the sample and an elastic supporting assembly for providing motion freedoms to adjust the relative geometric conditions between the optical-electronic assembly and the sample. The elastic supporting assembly has a planer structure and a cubic structure, and provides both motion freedoms on a plane and motion freedoms vertical to the plane. The optics electricity optical-electronic assembly could analyze the received reflected light to get geometric information of the sample, and could adjust the light used to detect the sample.
Public/Granted literature
- US20100165346A1 APPARATUS FOR DETECTING A SAMPLE Public/Granted day:2010-07-01
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