Invention Grant
- Patent Title: Stage with displacement magnification mechanism for measuring
- Patent Title (中): 用于测量的位移放大机构的阶段
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Application No.: US12373460Application Date: 2006-12-22
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Publication No.: US08089638B2Publication Date: 2012-01-03
- Inventor: Deug Woo Lee , Soo Chang Choi , Jung Woo Park
- Applicant: Deug Woo Lee , Soo Chang Choi , Jung Woo Park
- Agency: Lowe Hauptman Ham & Berner LLP
- Priority: KR10-2006-0065664 20060713; KR10-2006-0126116 20061212
- International Application: PCT/KR2006/005675 WO 20061222
- International Announcement: WO2008/007838 WO 20080117
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
Public/Granted literature
- US20090323083A1 STAGE WITH DISPLACEMENT MAGNIFICATION MECHANISM FOR MEASURING Public/Granted day:2009-12-31
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