Invention Grant
- Patent Title: Diaphragm changing device
- Patent Title (中): 隔膜更换装置
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Application No.: US12700351Application Date: 2010-02-04
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Publication No.: US08089707B2Publication Date: 2012-01-03
- Inventor: Hermann Bieg , Marcus Will , Thomas Bischoff , Yim-Bun Patrick Kwan , Uy-Liem Nguyen , Stefan Xalter , Michael Muehlbeyer
- Applicant: Hermann Bieg , Marcus Will , Thomas Bischoff , Yim-Bun Patrick Kwan , Uy-Liem Nguyen , Stefan Xalter , Michael Muehlbeyer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE10350545 20031029
- Main IPC: G02B9/00
- IPC: G02B9/00

Abstract:
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.
Public/Granted literature
- US20100134777A1 DIAPHRAGM CHANGING DEVICE Public/Granted day:2010-06-03
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