Invention Grant
- Patent Title: Acoustic sensor element
- Patent Title (中): 声学传感器元件
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Application No.: US12598994Application Date: 2008-06-10
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Publication No.: US08089828B2Publication Date: 2012-01-03
- Inventor: Frank Fischer , Arnim Hoechst
- Applicant: Frank Fischer , Arnim Hoechst
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007029911 20070628
- International Application: PCT/EP2008/057211 WO 20080610
- International Announcement: WO2009/000641 WO 20081231
- Main IPC: H04R19/04
- IPC: H04R19/04

Abstract:
A micromechanical acoustic sensor element, which has at least one diaphragm and at least one fixed counter element, the diaphragm being situated in a cavity between a substrate and the counter element and acting as movable electrode of a capacitor system, the counter element acting as first fixed counter electrode of this capacitor system, and at least one through hole being formed in the substrate for the application of sound pressure to the diaphragm. For fixation and strengthening purposes, the counter element is connected to the substrate via at least one support element. The support element is situated in the region of the cavity, and an opening is formed in the diaphragm for the support element.
Public/Granted literature
- US20100135123A1 ACOUSTIC SENSOR ELEMENT Public/Granted day:2010-06-03
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