Invention Grant
- Patent Title: Atomic force microscopy probe
- Patent Title (中): 原子力显微镜探针
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Application No.: US12598490Application Date: 2008-04-23
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Publication No.: US08091143B2Publication Date: 2012-01-03
- Inventor: Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
- Applicant: Marc Faucher , Lionel Buchaillot , Jean-Pierre Aime , Bernard Louis Amand Legrand , Gerard Couturier
- Applicant Address: FR Paris FR Talence
- Assignee: Centre National de la Recherche Scientifique,Universite de Bordeaux 1
- Current Assignee: Centre National de la Recherche Scientifique,Universite de Bordeaux 1
- Current Assignee Address: FR Paris FR Talence
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0703161 20070502
- International Application: PCT/FR2008/000580 WO 20080423
- International Announcement: WO2008/148951 WO 20081211
- Main IPC: G01N13/16
- IPC: G01N13/16 ; H01L29/84 ; H03H9/00

Abstract:
A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1′) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM′). A method of atomic force microscopy including the use of such a probe.
Public/Granted literature
- US20100205698A1 ATOMIC FORCE MICROSCOPY PROBE Public/Granted day:2010-08-12
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