Invention Grant
US08091143B2 Atomic force microscopy probe 有权
原子力显微镜探针

Atomic force microscopy probe
Abstract:
A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1′) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM′). A method of atomic force microscopy including the use of such a probe.
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