Invention Grant
- Patent Title: Method of manufacturing an acoustic mirror for a piezoelectric resonator
- Patent Title (中): 制造用于压电谐振器的声反射镜的方法
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Application No.: US12711484Application Date: 2010-02-24
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Publication No.: US08091190B2Publication Date: 2012-01-10
- Inventor: Robert Thalhammer , Stephan Marksteiner , Gernot Fattinger
- Applicant: Robert Thalhammer , Stephan Marksteiner , Gernot Fattinger
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/00 ; H03L9/00

Abstract:
A mirror for a piezoelectric resonator consisting of alternately arranged layers of high and low acoustic impedance is manufactured by at first producing a first layer on which a second layer is produced, so that the second layer partially covers the first layer. Then, a planarization layer is applied on the first layer and on the second layer. Subsequently, a portion of the second layer is exposed by structuring the planarization layer, wherein the portion is associated with an active region of the piezoelectric resonator. Finally, the resulting structure is planarized by removing the portions of the planarization layer remaining outside the portion.
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