Invention Grant
- Patent Title: Protection system for diaphragm of MEMS device
- Patent Title (中): MEMS器件隔膜保护系统
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Application No.: US12924027Application Date: 2010-09-14
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Publication No.: US08091430B1Publication Date: 2012-01-10
- Inventor: Kevin Cochran , Michael Deeds
- Applicant: Kevin Cochran , Michael Deeds
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Main IPC: G01L7/00
- IPC: G01L7/00

Abstract:
A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm.
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