Invention Grant
- Patent Title: Magnetic confinement of a plasma
- Patent Title (中): 等离子体的磁约束
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Application No.: US11564206Application Date: 2006-11-28
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Publication No.: US08092605B2Publication Date: 2012-01-10
- Inventor: Steven C. Shannon , Masao Drexel , James A. Stinnett , Ying Rui , Ying Xiao , Roger A. Lindley , Imad Yousif
- Applicant: Steven C. Shannon , Masao Drexel , James A. Stinnett , Ying Rui , Ying Xiao , Roger A. Lindley , Imad Yousif
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser IP Law Group
- Agent Alan Taboada
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306 ; C23F1/00

Abstract:
A method and apparatus for confining a plasma are provided herein. In one embodiment, an apparatus for confining a plasma includes a substrate support and a magnetic field forming device for forming a magnetic field proximate a boundary between a first region disposed at least above the substrate support, where a plasma is to be formed, and a second region, where the plasma is to be selectively restricted. The magnetic field has b-field components perpendicular to a direction of desired plasma confinement that selectively restrict movement of charged species of the plasma from the first region to the second region dependent upon the process conditions used to form the plasma.
Public/Granted literature
- US20080121345A1 MAGNETIC CONFINEMENT OF A PLASMA Public/Granted day:2008-05-29
Information query
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