Invention Grant
US08093100B2 Integrated circuit packaging system having through silicon via with direct interconnects and method of manufacture thereof 有权
集成电路封装系统具有通过直通互连的硅通孔及其制造方法

Integrated circuit packaging system having through silicon via with direct interconnects and method of manufacture thereof
Abstract:
A method of manufacture of an integrated circuit packaging system includes: providing a through silicon via die having an interconnect through a silicon substrate; depositing a re-distribution layer on the through silicon via die and connected to the interconnects; mounting a structure over the through silicon via die; connecting the structure to the interconnect of the through silicon via die with a direct interconnect; and encapsulating the through silicon via die and partially encapsulating the structure with an encapsulation.
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