Invention Grant
- Patent Title: Vertical transistor component
- Patent Title (中): 垂直晶体管元件
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Application No.: US12834000Application Date: 2010-07-11
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Publication No.: US08093654B2Publication Date: 2012-01-10
- Inventor: Martin Poelzl , Walter Rieger
- Applicant: Martin Poelzl , Walter Rieger
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Maginot Moore & Beck
- Priority: DE102004047627 20040930
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A method for producing a vertical transistor component includes providing a semiconductor substrate, applying an auxiliary layer to the semiconductor substrate, and patterning the auxiliary layer for the purpose of producing at least one trench which extends as far as the semiconductor substrate and which has opposite sidewalls. The method further includes producing a monocrystalline semiconductor layer on at least one of the sidewalls of the trench, producing an electrode insulated from the monocrystalline semiconductor layer on the at least one sidewall of the trench and the semiconductor substrate.
Public/Granted literature
- US20100270612A1 Method for producing a vertical transistor component Public/Granted day:2010-10-28
Information query
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