Invention Grant
- Patent Title: Microelectromechanical element and electromechanical switch using the same
- Patent Title (中): 微机电元件和机电开关使用相同
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Application No.: US11814187Application Date: 2006-10-11
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Publication No.: US08093968B2Publication Date: 2012-01-10
- Inventor: Yasuyuki Naito
- Applicant: Yasuyuki Naito
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2005-338922 20051124
- International Application: PCT/JP2006/320342 WO 20061011
- International Announcement: WO2007/060793 WO 20070531
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
A microelectromechanical element of a hydrophobic surface structure with a long life and high reliability and an electromechanical switch using the microelectromechanical element are provided. The surface of an electrode has a composite surface structure of a first area made of a first material forming the electrode and a second area made of a second material at least having hydrophobicity. The surface structure is the composite surface structure of the electrode material and a monolayer, whereby physical compression of the monolayer is avoided. A structure wherein the monolayer is not formed on the propagation path of a radio frequency signal is adopted, so that an increase in an insertion loss and electric field damage are avoided.
Public/Granted literature
- US20090200144A1 MICROELECTROMECHANICAL ELEMENT AND ELECTROMECHANICAL SWITCH USING THE SAME Public/Granted day:2009-08-13
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