Invention Grant
US08093968B2 Microelectromechanical element and electromechanical switch using the same 失效
微机电元件和机电开关使用相同

  • Patent Title: Microelectromechanical element and electromechanical switch using the same
  • Patent Title (中): 微机电元件和机电开关使用相同
  • Application No.: US11814187
    Application Date: 2006-10-11
  • Publication No.: US08093968B2
    Publication Date: 2012-01-10
  • Inventor: Yasuyuki Naito
  • Applicant: Yasuyuki Naito
  • Applicant Address: JP Osaka
  • Assignee: Panasonic Corporation
  • Current Assignee: Panasonic Corporation
  • Current Assignee Address: JP Osaka
  • Agency: Pearne & Gordon LLP
  • Priority: JP2005-338922 20051124
  • International Application: PCT/JP2006/320342 WO 20061011
  • International Announcement: WO2007/060793 WO 20070531
  • Main IPC: H01H51/22
  • IPC: H01H51/22
Microelectromechanical element and electromechanical switch using the same
Abstract:
A microelectromechanical element of a hydrophobic surface structure with a long life and high reliability and an electromechanical switch using the microelectromechanical element are provided. The surface of an electrode has a composite surface structure of a first area made of a first material forming the electrode and a second area made of a second material at least having hydrophobicity. The surface structure is the composite surface structure of the electrode material and a monolayer, whereby physical compression of the monolayer is avoided. A structure wherein the monolayer is not formed on the propagation path of a radio frequency signal is adopted, so that an increase in an insertion loss and electric field damage are avoided.
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