Invention Grant
- Patent Title: Inspection method and inspection apparatus
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Application No.: US12555610Application Date: 2009-09-08
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Publication No.: US08094295B2Publication Date: 2012-01-10
- Inventor: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
- Applicant: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2002-347134 20021129
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
Public/Granted literature
- US20100002227A1 INSPECTION METHOD AND INSPECTION APPARATUS Public/Granted day:2010-01-07
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