Invention Grant
US08094841B2 Apparatus and method using capacitive detection with inherent self-calibration
有权
使用具有固有自校准的电容检测的装置和方法
- Patent Title: Apparatus and method using capacitive detection with inherent self-calibration
- Patent Title (中): 使用具有固有自校准的电容检测的装置和方法
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Application No.: US11971767Application Date: 2008-01-09
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Publication No.: US08094841B2Publication Date: 2012-01-10
- Inventor: Alexander A. Trusov , Andrei M. Shkel
- Applicant: Alexander A. Trusov , Andrei M. Shkel
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agent Daniel L. Dawes; Marcus C. Dawes
- Main IPC: H04R25/00
- IPC: H04R25/00
Abstract:
The illustrated embodiment of the invention includes a capacitive detection method in a MEMS resonator comprising the steps of: vibrating a resonator with a drive signal; sensing vibration of the resonator by detecting a plurality of sidebands of an electromechanical amplitude modulation signal in a capacitive detector; and extracting amplitude of motion from a ratio of two simultaneously sensed sidebands of different order.
Public/Granted literature
- US20080170742A1 APPARATUS AND METHOD USING CAPACITIVE DETECTION WITH INHERENT SELF-CALIBRATION Public/Granted day:2008-07-17
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