Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
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Application No.: US12273068Application Date: 2008-11-18
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Publication No.: US08096180B2Publication Date: 2012-01-17
- Inventor: Kiyoko Yamanaka , Heewon Jeong
- Applicant: Kiyoko Yamanaka , Heewon Jeong
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-299210 20071119; JP2008-223182 20080901
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56

Abstract:
Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.
Public/Granted literature
- US20090126491A1 INERTIAL SENSOR Public/Granted day:2009-05-21
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