Invention Grant
US08097217B2 Atmospheric pressure plasma generating apparatus by induction electrode 有权
感应电极的大气压等离子体发生装置

  • Patent Title: Atmospheric pressure plasma generating apparatus by induction electrode
  • Patent Title (中): 感应电极的大气压等离子体发生装置
  • Application No.: US11774097
    Application Date: 2007-07-06
  • Publication No.: US08097217B2
    Publication Date: 2012-01-17
  • Inventor: Seok Kyun Song
  • Applicant: Seok Kyun Song
  • Applicant Address: KR
  • Assignee: Uion Co., Ltd
  • Current Assignee: Uion Co., Ltd
  • Current Assignee Address: KR
  • Agency: Park Law Firm
  • Agent John K. Park
  • Main IPC: B01J19/08
  • IPC: B01J19/08
Atmospheric pressure plasma generating apparatus by induction electrode
Abstract:
The present invention relates to an atmospheric pressure plasma generating apparatus using an induction electrode. In particular, one or more upper metal electrodes are disposed on the upper side and an induction electrode and an induction electrode antenna are disposed opposite to the upper electrodes, so that a high-density plasma is generated at low applied voltage. Further, base electrodes are used to preclude interference between the upper electrodes. Thus, lots of the upper electrodes can be constructed at a narrow space, the uniformity of intensity of a generated plasma can be secured, the source of a plasma can be provided by the upper electrodes, and the intensity of a plasma can be increased. In addition, a lower electrode is disposed on the lower side in order to extend the length of a generated plasma.
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